ISO 17470 pdf download Microbeam analysis — Electron probe microanalysis — Guidelines for qualitative point analysis by wavelength dispersive X-ray spectrometry
This International Standard gives guidance for the identification of elements and the investigation ofthe presence of specific elements within a specific volume (on a pm scale) contained in a specimenby analysing X-ray spectra obtained using wavelength dispersive X-ray spectrometers on an electronprobe microanalyser or on a scanning electron microscope.
2 Normative references
The following documents, in whole or in part, are normatively referenced in this document and areindispensable for its applcation. For dated references, only the edition cited applies. For undatedreferences, the latest edition of the referenced document (including any amendments) applies.
SO 14594:2003, Microbeam analysis – Electron probe microanalysis – Guidelines for the determinationofexperimental parameters for wavelength dispersive spectroscopy
3Terms and definitions
For the purposes ofthis document, the following terms and definitions apply.
higher order reflections
peaks appearing at the diffracted angles corresponding to n = 2, 3, 4..
Note 1 to entry: In WDs,X-rays are dispersed according to Bragg’s law,nA- 2dsin0,where is the X-ray wavelengthd is the interplanar spacing of the diffraction crystal, 0 is the diffraction angle, and n is an integer. The higherorder reflections are the peaks appearing at the diffracted angles corresponding to n = 2 3, 4…
analysis in which the primary beam is fixed, thus irradiating a selected region of a sample surface
Note 1 to entry: The method where the primary beam rapidly scans over a very small region on the sample surfaceis also included. The maximum size of a static beam or a raster area should be chosen such that relative X-rayintensities do not change when enlarging the analysis area.
X-ray line table
table of X-ray lines used for qualitative analysis by EPMA
Note 1 to entry: The X-ray line table for qualitative analysis by EPMA lists the wavelengths of K-, L- and, M-linesfor the elements observed on each diffraction crystal. lt can also list their relative intensities, the full width athalf maximum (FWHM)ofeach peak, the interplanar spacings ofthe diffraction crystals, and the wavelengths olsatellite peaks.
4 Abbreviated terms
EPMA electron probe microanalysis
WDS wavelength dispersive X-ray spectroscopy or spectrometry
Care should be taken to ensure the instrument is performing satisfactorily. In particular, that the electron column is correctly aligned, the beam current is stable, the accelerating voltage and beam current are appropriate for the sample, the sample surface is prepared suitably for quantitative analysis, the working distance is correct, and the spectrometer crystals and X-ray counters are calibrated and aligned so that the spectrum exhibits X-ray peaks with appropriate intensities and shapes.